Verios 5 XHR

Verios 5 XHR SEM

Precise SEM characterization of nanomaterials with sub-nanometer resolution and high material contrast.

The Verios 5 XHR SEM offers subnanometer resolution over the full 1 keV to 30 keV energy range with excellent materials contrast. Unprecedented levels of automation and ease-of-use make this performance accessible to users of any experience level.

Experience the advantages offered by the Verios XHR SEM:

High resolution nanomaterial imaging with the UC+ monochromated electron source for sub-nanometer performance from 1-30 kV.
High contrast on sensitive materials with excellent performance down to 20 eV landing energy and high-sensitivity in-column and below-the-lens detectors and signal filtering for low-dose operation and optimal contrast selection.
Greatly reduced time to nanoscale information for users with any experience level using the Elstar electron column featuring SmartAlign and FLASH technologies.
Consistent measurement results with ConstantPower lenses, electrostatic scanning and a choice of two piezoelectric stages.
Flexibility for accessories with a large chamber.
Unattended SEM operation with Thermo Scientific AutoScript 4 Software, an optional Python-based application programming interface.

Key Features

SmartAlign technology

SmartAlign technology eliminates the need for any user alignments of the electron column, which not only minimizes maintenance, but also increases your productivity.

Sub-nanometer resolution

Elstar Schottky monochromated (UC+) FESEM technology and performance with sub-nanometer resolution from 1 to 30 keV.

Low dose operation and optimal contrast selection

Advanced suite of high-sensitivity, in-column & below-the-lens detectors and signal filtering for low dose operation and optimal contrast selection.

Unattended SEM operation

With AutoScript 4 Software, an optional Python-based application programming interface (API).

Innovative electron optics

Including Thermo Scientific’s patented UC+ gun (monochromator), ConstantPower lenses and electrostatic scanning for accurate and stable imaging.

Consistent measurement results

The Verios is ideally suited to lab-based metrology applications, with the ability to calibrate to a NIST certified standard at high magnification.

Easy access to beam landing energies

As low as 20 eV with very high resolution for true surface characterization.

Large chamber

With a choice of two precise and stable piezo-driven stages.