Scios 2

Scios 2 DualBeam

Focused ion beam scanning electron microscopy at ultra-high resolution for high quality sample preparation and 3D characterization.

The Thermo Scientific Scios 2 DualBeam is an ultra-high-resolution analytical focused ion beam scanning electron microscopy (FIB-SEM) system that provides outstanding sample preparation and 3D characterization performance for a wide range of samples, including magnetic and non-conductive materials. With innovative features designed to increase throughput, precision, and ease of use, the Scios 2 DualBeam is an ideal solution to meet the needs of scientists and engineers in advanced research and analysis across academic, governmental, and industrial research environments.

High-quality subsurface and 3D information

Subsurface or three-dimensional characterization is often required to better understand the structure and properties of a sample. The Scios 2 DualBeam, with optional Thermo Scientific Auto Slice & View 4 (AS&V4) Software, allows for high-quality, fully automated acquisition of multi-modal 3D datasets, including backscattered electron (BSE) imaging for maximum materials contrast, energy-dispersive spectroscopy (EDS) for compositional information, and electron backscatter diffraction (EBSD) for microstructural and crystallographic information. Combined with Thermo Scientific Avizo Software, the Scios 2 DualBeam delivers a unique workflow solution for high-resolution, advanced 3D characterization and analysis at the nanometer scale.

Ultra-high resolution with complete sample information

The innovative NICol electron column provides the foundation of the system’s high-resolution imaging and detection capabilities. It offers excellent nanoscale details, with a wide range of working conditions, whether operating at 30 keV in STEM mode (to access structural information) or at lower energies (to obtain charge-free, detailed surface information). With its unique in-lens Thermo Scientific Trinity Detection System, the Scios 2 DualBeam is designed for simultaneous acquisition of angular and energy-selective secondary electron (SE) and BSE imaging. Fast access to detailed nanoscale information is possible not only top-down, but also on tilted specimens or cross-sections. Optional below-the-lens detectors and an electron-beam-deceleration mode ensure fast and easy simultaneous collection of all signals, revealing the smallest features in a material surface or cross-section. Fast, accurate, and reproducible results are obtained thanks to the unique NICol column design with full auto alignments.

Fast and easy preparation of high-quality TEM samples

Scientists and engineers constantly face new challenges that require highly localized characterization of increasingly complex samples with ever smaller features. The latest technological innovations of the Scios 2 DualBeam, in combination with the optional, easy-to-use, comprehensive Thermo Scientific AutoTEM 4 Software and Thermo Fisher Scientific’s application expertise, allow for fast and easy preparation of site-specific high-resolution S/TEM samples for a wide range of materials. In order to achieve high-quality results, final polishing with low-energy ions is required to minimize surface damage on the sample. The Sidewinder HT Focused Ion Beam (FIB) column not only delivers high-resolution imaging and milling at high voltages but also offers good low-voltage performance, enabling the creation of high-quality TEM lamella.

Key Features

Fast and easy preparation

High-quality, site-specific, TEM and atom probe samples using the Sidewinder HT ion column.

The most complete sample information

With sharp, refined, and charge-free contrast obtained from a variety of integrated in-column and below-the-lens detectors.

Precise sample navigation

Tailored to individual application needs thanks to the high flexibility 110 mm stage and in-chamber Thermo Scientific Nav-Cam Camera.

Optimize your solution

Meet specific application requirements thanks to flexible DualBeam configuration, inlcuding optional low-vacuum mode with up to 500 Pa chamber pressure.

Ultra-high resolution imaging

Using the Thermo Scientific NICol Electron Column with best-in-class performance on the widest range of samples, including magnetic and nonconductive materials.

High-quality, multi-modal subsurface and 3D information

Access the high-quality, multi-modal subsurface and 3D information with precise targeting of the region of interest using optional AS&V4 Software.

Artifact-free imaging and patterning

With dedicated modes such as DCFI, drift suppression and Thermo Scientific SmartScan Modes.

For more details: https://www.thermofisher.com/tr/en/home/electron-microscopy/products/dualbeam-fib-sem-microscopes/scios-2-dualbeam-microscope.html