PHI 710 Scanning Auger Nanoprobe

Overview

The PHI 710 Scanning Auger Nanoprobe provides high performance Auger (AES) spectral analysis, Auger imaging, and sputter depth profiling of complex materials including: nanomaterials, catalysts, metals, and electronic devices.

The 710's field emission electron source provides less than 3 nm dark space resolution for secondary electron imaging. The coaxial geometry of the 710’s electron column and Cylindrical Mirror Analyzer (CMA) enables high Auger sensitivity over a broad range collection angles ensuring rapid and complete analysis routine flat samples as well as samples with complex shapes or high surface roughness. A high energy resolution spectroscopy capability is available when needed.

A high performance sputter ion gun, motorized five axis sample stage, and high sensitivity analyzer provide a uniquely high performance thin film analysis (sputter depth profiling) capability. User selectable thin film analysis features including: multi-point thin film analysis, low voltage (100-500 V) sputtering, Compucentric Zalar Rotation™ and an array of advanced data reduction tools in PHIMultiPak, allow a user to extract as much information as possible from a sputter depth profile data set.

New features introduced with the 710 include: improved imaging capabilities, chemical state mapping with spectra at each pixel, and remote diagnostics capabilities.

For 40 years, PHI CMA based Auger instruments have been the first choice of surface analysts around the world. The PHI 710 provides a superior Auger instrument platform, proven reliability, and performance.