The DTT is a desktop turbomolecular pumped thermal evaporator for vacuum deposition of thin films. The triple-source evaporation or desk thermal evaporator with evaporation source (boat/basket/coil) selection system is ideal for deposition of multilayers or alloys.
This vacuum evaporator with its suitable dimensions is capable of reaching the desired pressure in a short time and coating process can take place within a few minutes. It is suitable for research, laboratory and electron microscopy applications.
What is SEM?
Features
- Multi-layer thermal coatings
- Plasma Cleaning
- Large format chamber
- High vacuum turbomolecular pump
| Pumping Speed | 90 l/s | 350 l/s |
| Ultimate Pressure | 7 x10-6 Torr | 7 x10-7 Torr |
- Two stage rotary vane backing pump, 4m3/h
- Full range vacuum gauge
- Evaporation source (boat/basket/coil) selection for multilayer thin film deposition
- Co–evaporation to form alloy films (optional)
- Quartz crystal monitoring system for real time thickness measurement (1 nm precision)
- Manual or automatic Timed or Thickness deposition
- Intuitive touch screen to control the coating process and rapid data input
- User friendly software that can be updated via network
- Equipped with electronic shutter
- Equipped with rotary sample holder (optional)
- 2 inches, 500 °C substrate heater (optional)
- Two-year warranty
- Vac coat Products are covered worldwide by both public and product Liability Insurance in case any property damage or personal injury happens caused by the Vac Coat systems.
Applications
- Metal & dielectric Films
- Fabrication of thin film sensors
- Optical components
- Nano & Microelectronic
- Solar Cells
Touch screen control with colorful display
The desk thermal evaporator is equipped with a 7” colored touch screen with full automatic control and data input that can be operated by even inexperienced users. The vacuum and deposition information can be observed as digital data or curves on the touchscreen. Information of the last 300 coatings can also be saved in the history page.
Thermal Evaporation Sources (boat/basket/coil)
The desk thermal evaporator can be fitted with three independent heat resistance thermal evaporation sources. The good design of the evaporation source holder causes no contamination from source materials on each other. The length of the source holders can be adjusted in the range of 5cm~9cm.
Specifications
- Multi boats, baskets and coils installation
- Records and plots coating parameters graphs
- Transfers the curves and deposition process data by USB port to PC
- Automatic control of the power of coating independent of pressure
- High current electrical feedthrough
- 0-100 high current, protected against short circuit, DC power supply
- Utilities: 220V-240V, 50/60 HZ, 16A
- Dimensions: 60 Cm H × 65 Cm W × 50 Cm D
- Shipping weight: ~ 60 kg
Options and Accessories
The DTT has the following options and accessories:
- High current power supply for co-evaporation
- Quartz crystal sensors
- Spare glass chamber
- Evaporation sources (boat/basket/coil)
- 2 inches, 500 °C substrate heater
- Sample rotation
- MFC
- Sealing gaskets
