The source holder position on the electric extensions embedded on the chamber lead can be easily adjusted by sliding on the extensions, which provides the upward and downward deposition configurations, where the samples are fixed on the S-Clip sample holder on the chamber lead in upward coating, or placed on the rotating sample holder on the baseplate in the downward coating arrangement.
Precise quartz crystal sensor thickness measurement, electronic shutter, and rotating sample holder (in the downward coating) enables controlled and uniform thin film deposition.